With EDXRF, the sample is excited by the X-ray tube directly or through a filter. A semiconductor detector analyzes the X-ray fluorescence radiation that comes directly from the sample.
Here, the detector together with the associated electronics counts and sorts, according to energy, all of the photons that reach it. A pulse height spectrum that indicates the number of photons or impulses for a given energy is established. The detector typically has only a few µs for processing, so that processing is accordingly limited to approximately 1,000,000 pulses per second. Using a filter, a portion of the exciting radiation can be screened out to avoid overloading the detector.